• PRODUCT
  • ULFA Technology
  • / PRODUCT / MEMBRANE / Antistatic device

Antistatic device: CO2 BUBBLER

- dissolving CO2 gas in liquid
- using the hollow fiber membrane module
- Control the De-Ionized Water static
- controls the non-resistivity value through the dissolved CO2 gas
(CO2 gas is dissolved into the water quickly and can decrease non-resistivity without contamination of DIW.)

APPLICATIONS

ITEM APPLICATION RESULT
LSI
LCD
OLED
 - Display cleaning
- Mask cleaning
- High pressure cleaning
- Cell cleaning
- Cleaning in dicing process 		- No dust sticky
- No scratch or hole on wafer

1000SL (1.2 L/min)

1000sl640x480
  • 1000SL (1.2L/min)
  • – Flow amount of treatment: 0.7~1.2L/min
  • – Control Range of non-resistivity: 0.1~1.0㏁·㎝
  • – Pressure of common water : 0.05~0.4MPa(common) Max.0.5 MPa
  • – CO2 gas feeding pressure :  0.2 MPa less
  • – CO2 gas set up pressure :  0.05~0.15MPa(pure 99.5%more)
  • – Temperature of common water : 20~30℃
  • – Power : DC 24 V (0.2A)
  • – Relay : Type “D” relay more
  • possible the manufacturing according to buyer’s request
Catalog
Download Layout
Download

20LU (20 L/min)

20lu-640x480
  • 20LU (20L/min)
  • - Flow amount of treatment: 3~18 L/min
  • - Control Range of non-resistivity: 0.1~1.0 ㏁·㎝  
  • - Pressure of common water : 0.05~0.4 MPa(common)   Max. 0.5 MPa 
  • - CO2 gas feeding pressure :  0.2 MPa less
  • - CO2 gas set up pressure :  0.05~0.15 MPa (pure 99.5% more)
  • - Temperature of common water : 20~30 ℃ 
  • - Power : DC 24 V (0.2A)
  • - Relay : Type “D” relay more
  • possible the manufacturing according to buyer’s request
Catalog
Download Layout
Download

25A (25 L/min)

25a-2640x480
  • 25A (25L/min)
  • - Flow amount of treatment: 3~22 L/min
  • - Control Range of non-resistivity: 0.1~1.0 ㏁·㎝  
  • - Pressure of common water : 0.05~0.4 MPa(common)   Max. 0.5 MPa 
  • - CO2 gas feeding pressure :  0.2 MPa less
  • - CO2 gas set up pressure :  0.05~0.15 MPa (pure 99.5% more)
  • - Temperature of common water : 20~30 ℃ 
  • - Power : DC 24 V (0.2A)
  • - Relay : Type “D” relay more
  • possible the manufacturing according to buyer’s request
Catalog
Download Layout
Download

UCL-50A (50 L/min)

2640x480
  • UCL-50A (50L/min)
  • - Flow amount of treatment: 0~50 L/min
  • - Control Range of non-resistivity: 0.1~1.0 ㏁·㎝  
  • - Pressure of common water : 0.05~0.4 MPa(common)   Max. 0.5 MPa 
  • - CO2 gas feeding pressure :  0.2 MPa less
  • - CO2 gas set up pressure :  0.05~0.15 MPa (pure 99.5% more))
  • - Temperature of common water : 20~30 ℃ 
  • - Power : DC 24 V (0.2A)
  • - Relay : Type “D” relay more
  • possible the manufacturing according to buyer’s request
Catalog
Download Layout
Download