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DEGASSING SYSTEM

- Remove gases dissolved in liquid. (O2, CO2, N2, H2, etc.)
- Fundamentally preventing of Micro Bubble
- Using the gas separation Membrane Module with high efficiency
- AIR Ejector way
- Degassing rate, up to 98%
- Large flow can also be degassed
- Real-time degassing

APPLICATIONS

ITEM APPLICATION RESULT
Semiconductor - Photo Process
- Coating Process
- Washing Process
 - Eliminates negative impact & de-bubbling on contact hole
- High Performance, Improving yields in semiconductor applications
Industries - Ultrasonic Washing Process
- Display(LCD, OLED)Washing
- High pressur eboiler feeding water
- Dye, Ink Jet		 - Removal of oxygen, CO2, nitrogen & alcohol compounds
- In-line to remove dissolved gases
- Improving washing process by improving ultrasonic power
Pharmaceutical purified water with a conductivity of < 1.3 µS/cm. Controlling and removing the dissolved CO2 from the water - Release EDI load
- expand the life time of ion exchange resin
- Improving pure of the purified water

Industries

Membrane De-aerator for varied Industries

- Beverage, Food Plant, Pharmaceutical, liquid, etc. degassing
- Ultrasonic, Boiler Feed Water, Ink Jet, etc. degassing
- Vacuum Pressure : -690mmHg ~ -740mmHg (70~20 Torr)
- Water of treatment DO : less 5[mg/L] (room temperature, Standard flow)
- Electronic Power : 3 wires code, AC 220V / 380V
- Common using Power : 3.3 KW / 3.7 KW / 5.5 KW
pro8
  • UDI-1TA
  • - Normal Flow : 1 ton/hr
  • UDI-5TA
  • - Normal Flow: 5 ton/hr
  • UDI-10TA
  • - Normal Flow: 10 ton/hr
  • possible the manufacturing according to buyer’s request
Catalog
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Developer / Thinner

Developer / Thinner

- Thinner degassing
- Photoresist(semiconductor /LCD / Color Filter) degassing
- Organic solvents degassing
- Vacuum Pressure : -690mmHg (70 Torr)
- Electronic Power : 100 ~ 220V AC / DC 24V 1.5A
- Electronic Output: RS-232C
pro6
  • UDO-3006B (Developer)
  • - Normal Flow : 1.7 L/min ( /module unit) Max 3L/min
  • UDT-154B (Thinner)
  • - Normal Flow : 50 cc/min ( /module unit) Max 300 cc/min
  • UDT-156B-3L (Thinner)
  • - Normal Flow: 50 cc/min ( /module unit) Max 150 cc/min
  • possible the manufacturing according to buyer’s request
Catalog
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IPA

Membrane De-aerator for IPA

- Photoresist (semiconductor /LCD Process) degassing
- ultrapure water degassing
- Ink degassing
- Maximum Vacuum Pressure : -660mmHg
- Electric Power : DC 24V
- Electronic output : RS-232C
pro5
  • UDT-152A-2
  • - Degassing Module : SEPAREL PF-13F(P)10K
  • - Module unit : Max. 2units
  • - Normal Flow: 50 cc/min (/unit)  Max. 150 cc/min
  • possible the manufacturing according to buyer’s request
Catalog
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